Honghu (Suzhou) Semiconductor Technology Co., Ltd

High Speed 320 WPH with OCR reading 1100 WPH without OCR reading High Reliability Robot Global Top Share (Yaskawa, hirata, Tazmo) Key Components MCBF

characteristics: Compatible with 200mm POD and open castte crystal boxes; Accurate and reliable motion control, capable of opening, closing, and seali

characteristic: Accurate and reliable motion control Automatic fault prevention device, including cassette slot/wafer mapping, stack detection, wafer

Wafer Size: 200mm Cassette Pick-up Position: 909mm (35.8 inches) Cassette Positioning: To within 0.005 inches (vertical) SMIF-Pod Load Height: 900mm (

Wafer Size: 200mm Cassette Pick-up Position: 909mm (35.8 inches) Cassette Positioning: To within 0.005 inches (vertical) SMIF-Pod Load Height: 900mm (

Wafer Vacuum Transfer Module (VTM) The Vacuum Transfer Module (VTM) is used in vacuum processes such as wafer etching, deposition (CVD, PVD, ALD), etc

300mm AMAT p/n 0040-88855 0040-70247 200 mm AMAT p/n 0040-36026 0040-35966 0040-03905 300mm &nb...

SiC edge/carrier ring AMAT p/n: 0200-02917 (300mm)/2nd New type 0200-23001 0200-03319 (300mm)/2nd New type 0200-23002 0200-36118 (200mm) 0200-00289 (2

Description LAMPartsNo. JHTP/N TSMCPartsNo. KIT, GASKET, TOP, ELCTD(TCP) 857-073299-001 JB08 30098770

VTM Core parts -wafer vaccum transfer module ( Hong Hu self-research ) Honghu vaccum transfer module introduction R (radial) axis: Measuring range: 10

Honghu atmospheric transfer module introduction Single-arm/double-arm construction, reversible, available on demand ; The interpolation algorithm supp