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China
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Personne àcontacter John
qianjing road, Beijing, Beijing
TSU***0 mulfunction coating machine has there functions of
multi-target magnetron sputtering, multi-arc ion plating and
evaporation coating. This machine mainly consists of the coating
chamber, circular planar target, rectangular target, multi-arc
target, evaporation of water-cooling electrodes, sputtering power,
multi-arc power, evaporation power, bias voltage power, ion source,
turbo-molecular pump system, rotating substrate, tubular heater,
carrier gas supply, cooling system, brand-new PLC electrical
control system, etc. The device has functions of multi-target
co-sputtering to achieve multi-purpose functions. It can
manufacture conductive film, semiconductor film, insulating single
or multilayer film. The machine is highly structured,
full-featured, easy to operate, fast vacuum-pumping. It is
applicable to develop a variety of super-hard films, wear-resistant
films, corrosion-resistant films and special function films, etc.
in the laboratory.
Main technical Specifications
Production   TSU***0 multi-function coating
machine
Chamber   **0 mm×H**0 mm
Size of effective coating space   **0 mm×H**0
mm
Workpiece movement   Rotation speed ***0RPM,
ferrofluidic seal
Magnetic control target   Circular target and
rectangular target
Multi-arc target   *5mm
Evaporation source   Evaporation electrode
reserved
Film types   Tools coating and decorative
coating
Structure of vacuum chamber   Vertical,
front-opened door and the rear pumping system, double-layer cooling
water
Vacuum system   Turbo-molecular pump + mechanical
pump
Ultimate vacuum   8.0×***5Pa
Vacuum speed   Pumped from the atmosphere to ***3Pa
 *0min
Control   Vacuumize automatically
Alarm and protection   It alarms in time and
executes appropriate protection measures when abnormal situations,
such as water shortage, over-current, over-voltage and open
circuit, happen on pumps and targets.
Optional components   Refrigeration cycle machin
Pays: | China |
N ° de modèle: | - |
Prix FOB: | Obtenir le dernier prix |
Localité: | - |
Prix de commande minimale: | - |
Commande minimale: | 1 |
Packaging Detail: | - |
Heure de livraison: | - |
Capacité de Fournir: | - |
Payment Type: | L/C, T/T |
Groupe de produits : | - |