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Small intelligent type PECVD,PECVD-S-150A
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Small intelligent type PECVD,PECVD-S-150A

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China

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Personne à contacter elaine

Hefei, Anhui

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Spécification du produit

La description

Small intelligent type PECVD,PECVD-S***0A  
 
Main features:
Small size,full function,Suitable for laboratory sample preparation and plasma treatment.
Set vacuum unit, gas supply system, RF source, automatic propulsion, heating furnace in on.All the controls are integrated into the touch screen control interface to make the device more intelligent and easy to operate.
Adjustable power range ****0W; adjustable temperature range: *******0 degrees; adjustable sputtering region: *****0mm; application: metal film, ceramic film, composite film, continuous growth of various films, etc. Expandable plasma cleaning etching and other functions.
 
Furnace

Max. temp ***0°C
Heating zone length **0mm
Constant zone length **0mm
Temp. control PID automatic control with *0 steps programmable,Operation interface is 7 "industrial control computer
Tube size *5,,*0(optional)
 
 
PE source:   
Signal frequency *3.*6 MHz±0.**5%
Power output range ****0W
 
Gas supply system Accurate control of gas flow with high precision mass Flowmeter
Mass Flowmeter reference range(N2) **0sccm、**0sccm **0sccm ï¼ˆoptional)
Accuracy ±1.5%
Repeatability precision ±0.2%
Working pressure difference range 0.1~0.5 MPa
Max. pressure 3MPa
 
Vacuum unit KF*5 series bellows and manual stopper valves
vacuum ***1 pa
The value can be displayed intuitively by the digital display vacuum tester
 

Pays: China
N ° de modèle: -
Prix FOB: Obtenir le dernier prix
Localité: -
Prix de commande minimale: -
Commande minimale: -
Packaging Detail: -
Heure de livraison: -
Capacité de Fournir: -
Payment Type: -
Groupe de produits : -

Mots-clés correspondants Anhui BEQ Equipment Technology CoLtd

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elaine < Anhui BEQ Equipment Technology CoLtd >

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