Prix FOB
Obtenir le dernier prix36800 /
|- Minimum Order
Pays:
China
N ° de modèle:
PT-1200T-4CVDPE
Prix FOB:
36800 / Obtenir le dernier prix
Localité:
-
Prix de commande minimale:
36800
Commande minimale:
-
Packaging Detail:
-
Heure de livraison:
-
Capacité de Fournir:
-
Payment Type:
T/T, L/C, D/P, Western Union, PayPal
Groupe de produits :
Personne à contacter Jessica
Zhengshang Road, Zhengzhou, Henan
PT****0T*4CVDPE is a compact CVD
system. It consists of Plasma RF power source, split tube furnace,
4 channels mass flow meter with gas mixing tank and high quality
mechanical pump. The CVD system is mainly used for deposit thin
film even in nano-scale, from a gas state to a solid state, such
as, diamond CVD coating, graphene growth, etc.
Outstanding features
1)Solid surface can be threat with plasma power
2)Gas flow can be accurately controlled by the gas mixer
3)Suitable for different material of deposition, including, SiOx,
SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Main technical data
Name Item Data
1) RF power Max. power
**0W
RF frequency
*3.*6MHz
Reflection power **0W
RF power output port *0Î
Cooling **8~**0VAC
2) Preheating furnace Max.
temperature ***0C
Working temperature
0~***0C
Temperature control Digital
programmable and PID automatic control
Temperature accuracy
+/*1.C
Working chamber Dia. *0x
**0x***0mmLength
Power supply **8V~**0V,
*0/*0Hz
3)Anti-corrosive pressure gauge Brand
Inficon
Type Anti-corrosive, gas-type
independent
high accuracy and
reproducibility at atmosphere
Easy to change plug and play
sensor element
4) Vacuum pump set Max. Vacuum
pressure *0E*2Torr
Type Heavy duty rotary vane
vacuum pump
Model PT-RT*4
5) Gas mixer tank Four precise
MFC with digital display to control the gas flow automatically
MFC1 Flow range from
0~**0sccm
MFC2 Flow range from
0~**0sccm
MFC3 Flow range from
0~**0sccm
MFC4 Flow range from
0~***0sccm
The flow range are optional
according to your concrete working condition
Needle valve and connect
tubes are also included
Pays: | China |
N ° de modèle: | PT-1200T-4CVDPE |
Prix FOB: | 36800 / Obtenir le dernier prix |
Localité: | - |
Prix de commande minimale: | 36800 |
Commande minimale: | - |
Packaging Detail: | - |
Heure de livraison: | - |
Capacité de Fournir: | - |
Payment Type: | T/T, L/C, D/P, Western Union, PayPal |
Groupe de produits : | tube furnace |