M5111-4WP/UM Closed three-stack soft landing diffusion/oxydation system By Hunan Red Solar New Energy Science and Technology Co., Ltd.,
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M5111-4WP/UM Closed three-stack soft landing diffusion/oxydation system
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M5111-4WP/UM Closed three-stack soft landing diffusion/oxydation system

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Hunan Red Solar New Energy Science and Technology Co., Ltd.

Hunan Red Solar New Energy Science and Technology Co., Ltd.

China

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Tongzipo West Road, Changsha National High-tech Industry Development Zone, Changsha, Hunan

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Spécification du produit

La description

The system adopts closed diffusion (cleaning diffusion). The SiC cantilever paddle retreats from quartz tube during the process. Pressure self-balancing system with independent intellectual property rights, quick re-warming system and unique gas feeding way are applied, protecting the process from ambient influences, hence improving the diffusion quality. The throughput is **0pcs/batch.

Pays: China
N ° de modèle: M5111-4WP/UM
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Mots-clés correspondants Hunan Red Solar New Energy Science and Technology Co., Ltd.

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